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Deposition of transparent conducting Al-doped ZnO thin films by ICP-assisted sputtering
http://hdl.handle.net/10069/25079
http://hdl.handle.net/10069/2507985ac36ec-8b0a-44d2-acab-3b6d4c70d186
名前 / ファイル | ライセンス | アクション |
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TENCON2010_1002.pdf (311.4 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2011-05-17 | |||||
タイトル | ||||||
タイトル | Deposition of transparent conducting Al-doped ZnO thin films by ICP-assisted sputtering | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Inductively-coupled plasma | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Optical spectroscopy | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Sputtering | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Transparent conducting oxide films | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Zinc oxide | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Shindo, Ryota
× Shindo, Ryota× Iwata, Tadashi× Hirashima, Akinori× Shinohara, Masanori× Matsuda, Yoshinobu |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Aluminum-doped zinc oxide (AZO) is one of the promising transparent conductive oxide materials, which is expected to be an alternative to tin-doped indium oxide (ITO) that for long has been widely used in industry. The authors have been engaged in the development of AZO deposition process using inductively-coupled plasma assisted sputtering in a couple of years. This paper reports the results showing effectiveness of inductively coupled plasma (ICP) assisted sputtering in AZO film deposition process. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 2010 IEEE Region 10 Conference (TENCON 2010) : Fukuoka, 2010.11.21-2010.11.24 | |||||
書誌情報 |
TENCON 2010 - 2010 IEEE Region 10 Conference p. 1002-1006, 発行日 2010-11 |
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ISBN | ||||||
識別子タイプ | ISBN | |||||
関連識別子 | 978-1-4244-6889-8 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1109/TENCON.2010.5686462 | |||||
権利 | ||||||
権利情報 | © 2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
出版者 | ||||||
出版者 | IEEE | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | TENCON 2010, pp.1002-1006; 2010 |