We investigated deposition process of amorphous carbon films using acetylene and methane as a source molecule, by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). We found that deposited film structures were different due to source molecules.
内容記述
ナノダイナミクス国際シンポジウム 平成20年1月46日(木) 於長崎大学
Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2022, Nagasaki University, Nagasaki, Japan, Poster Presentation