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ハーモニック電子サイクロトロン共鳴マイクロプラズマ源の開発
http://hdl.handle.net/10069/15049
http://hdl.handle.net/10069/15049d24f545d-6c1d-4cab-a911-2a107712820f
名前 / ファイル | ライセンス | アクション |
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KJ00004723980.pdf (378.7 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2008-03-05 | |||||
タイトル | ||||||
タイトル | ハーモニック電子サイクロトロン共鳴マイクロプラズマ源の開発 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
著者 |
松下, 正典
× 松下, 正典× 松田, 良信× 藤山, 寛 |
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著者別名 | ||||||
姓名 | Matsushita, Masanori | |||||
著者別名 | ||||||
姓名 | Matsuda, Yoshinobu | |||||
著者別名 | ||||||
姓名 | Fujiyama, Hiroshi | |||||
その他のタイトル | ||||||
その他のタイトル | Development of Harmonic Electron Cyclotron Resonance Micro-Plasma Sources | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Generation of low-pressure micro-plasmas was investigated theoretically and experimentally by using the electron cyclotron resonance plasma generated in the narrow gap of a coaxial tube. By using xenon and by applying the magnetic flux densities satisfying from the harmonic ECR to ECR conditions, we have succeeded in generating micro-plasmas in the 500 μm gap of a coaxial tube at the pressure of 10^<-2> Torr. | |||||
書誌情報 |
長崎大学工学部研究報告 巻 33, 号 61, p. 57-61, 発行日 2003-07 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 02860902 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00178418 | |||||
sortkey | ||||||
P00057-P00061 | ||||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 長崎大学工学部研究報告 Vol.33(61) p. 57-61, 2003 |