Development of Harmonic Electron Cyclotron Resonance Micro-Plasma Sources
抄録
Generation of low-pressure micro-plasmas was investigated theoretically and experimentally by using the electron cyclotron resonance plasma generated in the narrow gap of a coaxial tube. By using xenon and by applying the magnetic flux densities satisfying from the harmonic ECR to ECR conditions, we have succeeded in generating micro-plasmas in the 500 μm gap of a coaxial tube at the pressure of 10^<-2> Torr.
ハーモニック電子サイクロトロン共鳴マイクロプラズマ源の開発
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