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Nd-Fe-B film magnets with the thickness above 100 μm deposited on Si substrates
http://hdl.handle.net/10069/35908
http://hdl.handle.net/10069/359086b2accea-ca30-47c6-9ea7-13ef693a207f
名前 / ファイル | ライセンス | アクション |
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INTERMAG2015_7156598.pdf (450.4 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2015-10-29 | |||||
タイトル | ||||||
タイトル | Nd-Fe-B film magnets with the thickness above 100 μm deposited on Si substrates | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Nd-Fe-B, film magnet | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Si substrate | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | PLD (Pulsed Laser Deposition) | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | MEMS | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Nakano, Masaki
× Nakano, Masaki× Chikuba, Y.× Oryoshi, M.× Yamashita, A.× Yanai, Takeshi× Fujiwara, R.× Shinshi, T.× Fukunaga, Hirotoshi |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Although increase in thickness of an Nd-Fe-B film magnet is indispensable to provide a sufficient magnetic field, it was difficult to suppress the peeling phenomenon due to the different values of a linear expansion coefficient for a Si substrate and a Nd-Fe-B film even if a buffer layer such as a Ta film was used. In this report, it was confirmed that a control of the microstructure for PLD (Pulsed Laser Deposition)-fabricated Nd-Fe-B films enabled us to increase the thickness up to approximately 160 μm without a buffer layer on a Si substrate. Namely, we found that the precipitation of Nd element at the boundary of Nd-Fe-B grains together with the triple junctions due to the composition adjustment is effective to suppress the destruction of the samples through an annealing process. The magnetic properties of the prepared films were comparable to those of previously reported ones deposited on metal substrates. Although the mechanism is under investigation, the above-mentioned film had stronger adhesive force compared with that of a sputtering-made film. Resultantly, no deterioration of mechanical together with magnetic properties could be observed after a dicing process. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 2015 IEEE International Magnetics Conference, INTERMAG 2015; Beijing; China; 11 May 2015 through 15 May 2015 | |||||
書誌情報 |
2015 IEEE Magnetics Conference (INTERMAG) p. 7156598, 発行日 2015-07-14 |
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ISBN | ||||||
識別子タイプ | ISBN | |||||
関連識別子 | 9781479973217 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1109/INTMAG.2015.7156598 | |||||
権利 | ||||||
権利情報 | c 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
出版者 | ||||||
出版者 | IEEE | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 2015 IEEE Magnetics Conference (INTERMAG), 7156598; 2015 |