@inproceedings{weko_13053_1,
   author	 = "Shindo,Ryota and Iwata,Tadashi and Hirashima,Akinori and Shinohara,Masanori and Matsuda,Yoshinobu",
   title	 = "Deposition of transparent conducting Al-doped ZnO thin films by ICP-assisted sputtering",
   booktitle	 = "TENCON 2010 - 2010 IEEE Region 10 Conference",
   year 	 = "2010",
   volume	 = "",
   number	 = "",
   pages	 = "1002--1006",
   publisher	 = "IEEE",
   month	 = "nov"
}