@misc{weko_17479_1,
   author	 = "Kawazoe,Hiroki and Inayoshi,Takanori and Shinohara,Masanori and Matsuda,Yoshinobu and Fujiyama,Hiroshi and Nitta,Yuki and Nakatani,Tatsuyuki",
   title	 = "Source Molecular Effect on Amorphous Carbon Film Deposition",
   month	 = "jan",
   year 	 = "2009"
}