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Thermal probe measurements of energy flux onto a substrate during ICP assisted sputter-deposition
http://hdl.handle.net/10069/25080
http://hdl.handle.net/10069/250803685ea4f-0bb5-4a5c-b06f-64128d325b73
名前 / ファイル | ライセンス | アクション |
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TENCON2010_2208.pdf (287.4 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2011-05-17 | |||||
タイトル | ||||||
タイトル | Thermal probe measurements of energy flux onto a substrate during ICP assisted sputter-deposition | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Energy flux | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Inductively coupled plasma | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Thermal probe | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Transparent conductive film | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Kitagawa, Hiroaki
× Kitagawa, Hiroaki× Kan, Ryoji× Mine, Kenji× Shinohara, Masanori× Matsuda, Yoshinobu |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Substrate energy flux in the inductively coupled plasma (ICP) assisted magnetron discharge has been measured by using a home-made thermal probe. The energy flux depends predominantly on the ICP power. In addition, substrate bias dependence of the substrate energy flux has been measured. As a result, it has been confirmed that the measured heat influx in an ICP is in good agreement with the theoretically calculated value within 30% error. Thus, substrate energy flux during the ICP assisted sputtering is quantitatively clarified. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 2010 IEEE Region 10 Conference (TENCON 2010) : Fukuoka, 2010.11.21-2010.11.24 | |||||
書誌情報 |
TENCON 2010 - 2010 IEEE Region 10 Conference p. 2208-2212, 発行日 2010-11 |
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ISBN | ||||||
識別子タイプ | ISBN | |||||
関連識別子 | 978-1-4244-6889-8 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1109/TENCON.2010.5686695 | |||||
権利 | ||||||
権利情報 | © 2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
出版者 | ||||||
出版者 | IEEE | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | TENCON 2010, pp.2208-2212; 2010 |