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マルチホロー陰極型同軸マグネトロンプラズマによる窒化チタン薄膜の形成
http://hdl.handle.net/10069/24350
http://hdl.handle.net/10069/243505a728c2e-7c36-4249-bef0-b21f9f366da8
名前 / ファイル | ライセンス | アクション |
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kogaku21_37_08.pdf (1.6 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2010-10-25 | |||||
タイトル | ||||||
タイトル | マルチホロー陰極型同軸マグネトロンプラズマによる窒化チタン薄膜の形成 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
著者 |
松本, 健
× 松本, 健× 山口, 甚一郎× 藤山, 寛 |
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著者別名 | ||||||
姓名 | Matsumoto, Tsuyoshi | |||||
著者別名 | ||||||
姓名 | Yamaguchi, Jin-Ichiro | |||||
著者別名 | ||||||
姓名 | Fujiyama, Hiroshi | |||||
その他のタイトル | ||||||
その他のタイトル | Preparation of Titanium Nitride Thin Films by Using Coaxial Magnetron Plasmas with Multi Hollow Cathodes | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | In order to prepare a protective thin film on inner wall of a metallic pipe with a small diameter, we developed a new coating method by using coaxial magnetron plasmas with multi hollow cathodes. In this method, in addition to the magnetron effect, hollow cathode discharge was realized to get high current density for lower pressure condition than that of a conventional coaxial magnetron plasma source. By using this plasma source, trial preparation of titanium nitride thin films on inner wall of a metallic pipe has been successfully performed at high deposition rate, ~100 [Å/sec] . | |||||
書誌情報 |
長崎大学工学部研究報告 en : Reports of the Faculty of Engineering, Nagasaki University 巻 21, 号 37, p. 149-156, 発行日 1991-07 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 02860902 | |||||
EISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 18805574 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00178418 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | 長崎大学工学部 | |||||
出版者別言語 | ||||||
Faculty of Engineering, Nagasaki University | ||||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 長崎大学工学部研究報告, 21(37), pp.149-156; 1991 |