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Mechanism of particle transport in magnetized silane plasmas
http://hdl.handle.net/10069/25016
http://hdl.handle.net/10069/25016ad9c8a31-aa91-4905-bc08-1fa0acd0032a
名前 / ファイル | ライセンス | アクション |
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PSST5_333.pdf (813.2 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2011-05-06 | |||||
タイトル | ||||||
タイトル | Mechanism of particle transport in magnetized silane plasmas | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Yang, S-C
× Yang, S-C× Nakajima, Y× Maemura, Yoko× Matsuda, Yoshinobu× Fujiyama, Hiroshi |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Particle transport phenomena were investigated in silane plasmas in the presence of a magnetic field B perpendicular to a discharge electric field E. From the experimental results, it was concluded that silicon particles were transported in the opposite direction to the E × B drift, and the particle density decreased with increasing applied magnetic flux density. Theoretical calculations on particle drift show that negatively charged particles can be transported in the opposite direction to E × B drift and the drift velocity increases with B for the present experimental conditions. Both experimental and theoretical results suggest that transport by modified ambipolar E × B drift can eliminate particles from discharge space. | |||||
書誌情報 |
Plasma Sources Science and Technology 巻 5, 号 2, p. 333-338, 発行日 1996-05 |
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出版者 | ||||||
出版者 | Institute of Physics Publishing | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 09630252 | |||||
EISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13616595 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10817078 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1088/0963-0252/5/2/032 | |||||
権利 | ||||||
権利情報 | This is an author-created, un-copyedited version of an article accepted for publication in Plasma Sources Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at http://dx.doi.org/10.1088/0963-0252/5/2/032. | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Plasma Sources Science and Technology, 5(2), pp.333-338; 1996 |