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Application of ion conductors for microfabrication of solid surface
http://hdl.handle.net/10069/23164
http://hdl.handle.net/10069/231643c5d6ae6-9c71-46df-b239-72c3c7d08794
名前 / ファイル | ライセンス | アクション |
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JCSJ118_263.pdf (1.3 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-05-24 | |||||
タイトル | ||||||
タイトル | Application of ion conductors for microfabrication of solid surface | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Electrochemical micromachining | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Microcontact | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Microelectrode | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Pinpoint doping | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Solid electrolyte | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Kamada, Kai
× Kamada, Kai |
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著者別名 | ||||||
姓名 | 鎌田, 海 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The present paper describes novel microfabrication techniques which utilize an ion migration at the microcontact between ion conductor and target solid. Two different methods have been recently proposed by our group. One is a solid state electrochemical route for pinpoint doping using an ion conductor. in this approach, an electric field is applied to the solid-solid interface between the cation conductor and target solid, inducing the injection of cations into the target. A significant advantage of this technique is that it enables pinpoint doping into desired locations within a solid target using the ion conductor having an extremely small contact area. On the other hand, we have also investigated an electrochemical microstructuring (i.e., micromachining) of metal surface through an anodic reaction of metal substrate attached to the needle-like ion conductor. The metal substrate is electrochemically oxidized, and then dissolves as Mn+ into the ion conductor placed at the cathodic side. As a result of the continuous application of electric field, the metal surface is drilled according to the apex form of the ion conductor employed. This paper reveals the characteristics (merits and demerits) of the present techniques vis-a-vis conventional techniques for doping or micromachining. | |||||
書誌情報 |
Journal of the Ceramic Society of Japan 巻 118, 号 1376, p. 263-268, 発行日 2010-04 |
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出版者 | ||||||
出版者 | The Ceramic Society of Japan | |||||
出版者別言語 | ||||||
日本セラミックス協会 | ||||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 09145400 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11556832 | |||||
権利 | ||||||
権利情報 | ©2010 The Ceramic Society of Japan. All rights reserved. | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Journal of the Ceramic Society of Japan, 118(1376), pp.263-268; 2010 |