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H2 sensing properties of diode-type gas sensors fabricated with Ti- and/or Nb-based materials
http://hdl.handle.net/10069/22207
http://hdl.handle.net/10069/22207c187b3f2-a6af-46ba-9593-69b747a4a3c5
名前 / ファイル | ライセンス | アクション |
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SABC142_97.pdf (7.9 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2009-10-01 | |||||
タイトル | ||||||
タイトル | H2 sensing properties of diode-type gas sensors fabricated with Ti- and/or Nb-based materials | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Gas sensor | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Hydrogen | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Niobium oxide | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Palladium | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Titania | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Hyodo, Takeo
× Hyodo, Takeo× Shibata, Hiroki× Shimizu, Yasuhiro× Egashira, Makoto |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A thermally oxidized TiO2 or Nb2O5 film equipped with a top Pd film electrode and a bottom Ti or Nb plate electrode (Pd/MO(n)/M, MO: oxide film, M: metal plate, n: annealing temperature (°C)) has been investigated as a diode-type H2 sensor under air or N2 atmosphere. Pd/TiO2(n)/Ti sensors showed relatively poor H2 sensing properties in air, in comparison with Pd/anodic-TiO2(n)/Ti sensors constructed with an anodized TiO2 film equipped with a top Pd film electrode and a bottom Ti plate electrode, which were reported in our previous studies. On the other hand, Pd/Nb2O5(n)/Nb sensors showed relatively larger H2 response with fast response and recovery speeds than Pd/TiO2(n)/Ti sensors in air under high forward bias conditions. A Pd/Nb2O5(450)/Ti sensor, which was fabricated by radio-frequency magnetron sputtering of Nb metal on a Ti substrate followed by thermal oxidation at 450 °C, showed the largest H2 response and relatively fast response and recovery speeds in air, among the sensors tested. In addition, H2 response of the Pd/Nb2O5(450)/Ti sensor in air was much lower than that in N2, but the logarithm of H2 response was almost proportional to the logarithm of H2 concentration in a wide range of H2 concentration (10-8000 ppm) in air, and the H2 sensitivity in air was much higher than that in N2. | |||||
書誌情報 |
Sensors and Actuators B: Chemical 巻 142, 号 1, p. 97-104, 発行日 2009-10-12 |
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出版者 | ||||||
出版者 | Elsevier BV | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 09254005 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA1078104X | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1016/j.snb.2009.07.058 | |||||
権利 | ||||||
権利情報 | c 2009 Elsevier B.V. All rights reserved. | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Sensors and Actuators B: Chemical, 142(1), pp.97-104; 2009 |