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Observation of Arcing in DC Magnetron Sputtering of AZO Target
http://hdl.handle.net/10069/21302
http://hdl.handle.net/10069/21302398d5bb4-3289-4e20-8b42-0cfc5fa42bb3
名前 / ファイル | ライセンス | アクション |
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NSND2009_P29.pdf (829.3 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2009-03-09 | |||||
タイトル | ||||||
タイトル | Observation of Arcing in DC Magnetron Sputtering of AZO Target | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Komine, Kazuki
× Komine, Kazuki× Shinohara, Masanori× Matsuda, Yoshinobu |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Arcing phenomena was investigated in DC magnetron sputtering of AZO target. Arc count was found to depend on discharge power and working pressure. The arc most frequently occurred at 5mTorr. Velocity of cathode spot was larger for higher pressure. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | ナノダイナミクス国際シンポジウム 平成20年1月61日(木) 於長崎大学 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2037, Nagasaki University, Nagasaki, Japan, Poster Presentation | |||||
書誌情報 | p. 66-67, 発行日 2009-01-27 | |||||
出版者 | ||||||
出版者 | Nano-Dynamics Group, Nagasaki University | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nano/nano.html | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2043), p.66-67; 2009 |