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Influence of hydrogen addition on electric and optical properties of sputter-deposited aluminum-doped zinc oxide thin films
http://hdl.handle.net/10069/21314
http://hdl.handle.net/10069/2131461357a19-7a3e-4e94-a289-8e45348d5ff9
名前 / ファイル | ライセンス | アクション |
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NSND2009_P17.pdf (429.9 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2009-03-09 | |||||
タイトル | ||||||
タイトル | Influence of hydrogen addition on electric and optical properties of sputter-deposited aluminum-doped zinc oxide thin films | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Kan, Ryoji
× Kan, Ryoji× Iwata, Tadashi× Shibasaki, Takashi× Shinohara, Masanori× Matsuda, Yoshinobu |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We have investigated the influence of hydrogen addition on AZO thin films. The electric conductivity of the film was improved when a very small amount of hydrogen (0.25%) was added, but was decreased by adding excessive amount of hydrogen. The optical transmittance and the deposition rate were almost constant for a small amount of hydrogen addition of not more than 0.5%, but decreased by adding excessive amount of hydrogen. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | ナノダイナミクス国際シンポジウム 平成20年1月49日(木) 於長崎大学 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2025, Nagasaki University, Nagasaki, Japan, Poster Presentation | |||||
書誌情報 | p. 44-45, 発行日 2009-01-27 | |||||
出版者 | ||||||
出版者 | Nano-Dynamics Group, Nagasaki University | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nano/nano.html | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2031), p.44-45; 2009 |