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Monitoring of Chemical Vapor Deposition Process of Hydrocarbon Thin Films by Optical Reflectance Interferometry
http://hdl.handle.net/10069/21315
http://hdl.handle.net/10069/21315e1c20b43-cd73-4264-a239-e09833a88b20
名前 / ファイル | ライセンス | アクション |
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NSND2009_P16.pdf (447.6 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2009-03-09 | |||||
タイトル | ||||||
タイトル | Monitoring of Chemical Vapor Deposition Process of Hydrocarbon Thin Films by Optical Reflectance Interferometry | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
Uehara, Kazuishi
× Uehara, Kazuishi× Shinohara, Masanori× Matsuda, Yoshinobu |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Optical reflectance interference has been investigated during the deposition processes of hydrocarbon thin films. A clear oscillation in the laser power reflected from the substrate has been observed during the deposition. From the instantaneous oscillation amplitude, temporal change in the refractive index was evaluated. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | ナノダイナミクス国際シンポジウム 平成20年1月48日(木) 於長崎大学 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2024, Nagasaki University, Nagasaki, Japan, Poster Presentation | |||||
書誌情報 | p. 42-43, 発行日 2009-01-27 | |||||
出版者 | ||||||
出版者 | Nano-Dynamics Group, Nagasaki University | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html | |||||
関係URI | ||||||
関連名称 | http://www.mase.nagasaki-u.ac.jp/nano/nano.html | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Nagasaki Symposium on Nano-Dynamics 2009 (NSND2030), p.42-43; 2009 |