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基板表面磁界がスパッタ薄膜結晶配向性に及ぼす影響
http://hdl.handle.net/10069/15046
http://hdl.handle.net/10069/1504690e53bdf-2df3-4adf-a152-a0a8096bd051
名前 / ファイル | ライセンス | アクション |
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KJ00004723977.pdf (1.2 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2008-03-05 | |||||
タイトル | ||||||
タイトル | 基板表面磁界がスパッタ薄膜結晶配向性に及ぼす影響 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
著者 |
丸本, 洋
× 丸本, 洋× 松田, 良信× 篠原, 正典× 藤山, 寛 |
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著者別名 | ||||||
姓名 | Marumoto, Hiroshi | |||||
著者別名 | ||||||
姓名 | Matsuda, Yoshinobu | |||||
著者別名 | ||||||
姓名 | Shinohara, Masanori | |||||
著者別名 | ||||||
姓名 | Fujiyama, Hiroshi | |||||
その他のタイトル | ||||||
その他のタイトル | Influence of Magnetic Field near Substrate Surface on Crystal Orientation of Sputtered Thin Films | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We investigated the influence of magnetic field near substrate surface (B_<sub>) on the crystal orientations of iron (Fe) thin by direct current (DC) magnetron sputtering deposition. We found that the effect depends on the iron deposition rates. While the crystal orientation of Fe thin films varied from Fe (110) to Fe (200) at the deposition rate of 9 and 12nm/min with the increase of B_<sub>, the crystal orientation did not change at the low deposition rate such as 4nm/min. | |||||
書誌情報 |
長崎大学工学部研究報告 巻 33, 号 61, p. 41-45, 発行日 2003-07 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 02860902 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00178418 | |||||
sortkey | ||||||
P00041-P00045 | ||||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 長崎大学工学部研究報告 Vol.33(61) p. 41-45, 2003 |