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走査プラズマ法を用いた高分子フィルム上へのZnO薄膜の低温形成
http://hdl.handle.net/10069/15048
http://hdl.handle.net/10069/15048af35df65-9cc7-444c-b096-878c2f02890f
名前 / ファイル | ライセンス | アクション |
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KJ00004723979.pdf (291.8 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2008-03-05 | |||||
タイトル | ||||||
タイトル | 走査プラズマ法を用いた高分子フィルム上へのZnO薄膜の低温形成 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
著者 |
馬場, 健次
× 馬場, 健次× 篠原, 正典× 藤山, 寛× 山本, 恭一× 宇山, 春夫 |
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著者別名 | ||||||
姓名 | Baba, Kenji | |||||
著者別名 | ||||||
姓名 | Shinohara, Masanori | |||||
著者別名 | ||||||
姓名 | Fujiyama, Hiroshi | |||||
著者別名 | ||||||
姓名 | Yamamoto, Kyoichi | |||||
著者別名 | ||||||
姓名 | Uyama, Haruo | |||||
その他のタイトル | ||||||
その他のタイトル | Low Temperature Sputter-Deposition of ZnO on Polymers by the Scanning Plasma Method | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | ZnO thin films were prepared on polyethylene terephthalate (PET) substrates using the scanning plasma method. We investigate the dependence of the scanning frequency and magnetic flux density on the substrate temperatures. We found the substrate was kept at low temperatures by modulating magnetic field and magnetic field frequency. | |||||
書誌情報 |
長崎大学工学部研究報告 巻 33, 号 61, p. 53-56, 発行日 2003-07 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 02860902 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00178418 | |||||
sortkey | ||||||
P00053-P00056 | ||||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 長崎大学工学部研究報告 Vol.33(61) p. 53-56, 2003 |