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細管内壁コーティングのためのヘリコン波プラズマ源の開発
http://hdl.handle.net/10069/15092
http://hdl.handle.net/10069/15092a6a794ad-ca49-4995-b7fd-8e48c0414694
名前 / ファイル | ライセンス | アクション |
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KJ00004724049.pdf (373.6 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2008-03-05 | |||||
タイトル | ||||||
タイトル | 細管内壁コーティングのためのヘリコン波プラズマ源の開発 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
著者 |
小島, 裕爾
× 小島, 裕爾× 篠原, 正典× 松田, 良信× 藤山, 寛 |
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著者別名 | ||||||
姓名 | Kojima, Yuji | |||||
著者別名 | ||||||
姓名 | Shinohara, Masanori | |||||
著者別名 | ||||||
姓名 | Matsuda, Yoshinobu | |||||
著者別名 | ||||||
姓名 | Fujiyama, Hiroshi | |||||
その他のタイトル | ||||||
その他のタイトル | Development of Helicon Plasma Source for the Inside Wall Coating of Narrow Tubes | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | For the high-rate inside wall coating of narrow tubes with low melting temperature, production of high-density plasma inside the tube is required at as low pressure as possible. Chemical or physical vapor deposition using helicon plasma source is one of the candidates for this purpose. Thus, the helicon plasma source has been constructed in our laboratory. Using an external half-turn helical antenna of 10 cm long, argon helicon plasma with the maximum electron density of 8×10^<11>cm^<-3> has been created in a 5 cm diameter quartz tube at the pressure of 30mTorr, with the input RF (13.56MHz) power of 500W and the magnetic field of 500 Gauss. | |||||
書誌情報 |
長崎大学工学部研究報告 巻 35, 号 64, p. 23-27, 発行日 2005-03 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 02860902 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00178418 | |||||
sortkey | ||||||
P00023-P00027 | ||||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 長崎大学工学部研究報告 Vol.35(64) p. 23-27, 2005 |