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Deposition of Aluminum-Doped ZnO Films by ICP-Assisted Sputtering
http://hdl.handle.net/10069/34077
http://hdl.handle.net/10069/34077f31f03db-5434-46d9-845d-5c087336d123
名前 / ファイル | ライセンス | アクション |
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SSMS180_125.pdf (1.0 MB)
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Item type | 図書 / Book(1) | |||||
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公開日 | 2014-09-24 | |||||
タイトル | ||||||
タイトル | Deposition of Aluminum-Doped ZnO Films by ICP-Assisted Sputtering | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_2f33 | |||||
資源タイプ | book | |||||
著者 |
Matsuda, Yoshinobu
× Matsuda, Yoshinobu× Hirashima, Akinori× Mine, Kenji× Hashimoto, Takuhiro× Matsuoka, Daichi× Shinohara, Masanori× Okada, Tatsuo |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Inductively coupled plasma (ICP) assisted DC sputter deposition was used for the deposition of Al-doped ZnO (AZO or ZnO:Al) thin films. With increasing ICP RF power, film properties including deposition rate, crystallinity, transparency, and resistivity were improved. To understand the plasma-surface interaction, several plasma diagnostics were performed. Heat fluxes to the substrate were measured by thermal probes, number densities of sputtered metallic atom species were measured by absorption spectroscopy using hollow cathode lamps (HCL) and light emitting diodes (LEDs), and neutral gas temperatures were measured by external cavity diode laser (ECDL) absorption spectroscopy. As a result, it was revealed that the high-density ICP heated the substrate through a high heat flux to the substrate, resulting in a high-quality film deposition without the need for intentional substrate heating. The heat flux to the substrate was predominantly contributed by the plasma charged species, not by the neutral Ar atoms which were also significantly heated in the ICP. The substrate position where the highest quality films were obtained was found to coincide with the position where the substrate heat flux took the maximum value. | |||||
書誌情報 |
Springer Series in Materials Science 巻 180, p. 125-148, 発行日 2013-09-23 |
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DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1007/978-81-322-1160-0_6 | |||||
権利 | ||||||
権利情報 | c Springer India 2014. | |||||
権利 | ||||||
権利情報 | The final publication is available at link.springer.com | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
出版者 | ||||||
出版者 | Springer India | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Springer Series in Materials Science, 180, pp.125-148; 2014 |