WEKO3
アイテム
{"_buckets": {"deposit": "0dbd4091-f942-4125-bb54-462618fbf61a"}, "_deposit": {"created_by": 2, "id": "633", "owners": [2], "pid": {"revision_id": 0, "type": "depid", "value": "633"}, "status": "published"}, "_oai": {"id": "oai:nagasaki-u.repo.nii.ac.jp:00000633", "sets": ["21"]}, "author_link": ["112174", "112173", "112171", "112172", "112175", "112176", "112177", "112178"], "item_2_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2019-12-19", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "SE", "bibliographicPageStart": "SEEE01", "bibliographicVolumeNumber": "59", "bibliographic_titles": [{"bibliographic_title": "Japanese Journal of Applied Physics"}]}]}, "item_2_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "We investigated the possibility of R (Nd or Pr)-Fe-B thick-film magnets applied to MEMS. First, an enhancement in the thickness of the Si oxide layer on a Si substrate enabled us to increase the adhesion force between the Si substrate and Nd-Fe-B film. Then, after depositing a glass buffer layer on the Si substrate to obtain a thicker Si oxide layer, we compared the mechanical characteristics and magnetic properties of both Pr-Fe-B and Nd-Fe-B films. As the thickness of the glass buffer layer increased, the thickness of the Pr-Fe-B film could be enhanced without mechanical destruction. We had difficulty in exceeding the thickness of 100 μm in Nd-Fe-B films. Moreover, the (BH)max value of a 127-μm-Thick Pr-Fe-B film was higher by approximately 30 kJ m-3 than that of a 92-μm-Thick Nd-Fe-B film. The obtained results suggest that a Pr-Fe-B thick-film magnet is more suitable for MEMS applications.", "subitem_description_type": "Abstract"}]}, "item_2_description_63": {"attribute_name": "引用", "attribute_value_mlt": [{"subitem_description": "Japanese Journal of Applied Physics, 59(SE), art.no.SEEE01; 2020", "subitem_description_type": "Other"}]}, "item_2_publisher_33": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "The Japan Society of Applied Physics"}]}, "item_2_relation_12": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isIdenticalTo", "subitem_relation_type_id": {"subitem_relation_type_id_text": "10.7567/1347-4065/ab5534", "subitem_relation_type_select": "DOI"}}]}, "item_2_rights_13": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "c 2019 The Japan Society of Applied Physics."}]}, "item_2_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "00214922", "subitem_source_identifier_type": "ISSN"}]}, "item_2_source_id_8": {"attribute_name": "EISSN", "attribute_value_mlt": [{"subitem_source_identifier": "13474065", "subitem_source_identifier_type": "ISSN"}]}, "item_2_text_62": {"attribute_name": "出版者別言語", "attribute_value_mlt": [{"subitem_text_value": "応用物理学会"}]}, "item_2_version_type_16": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Nakano, Masaki"}], "nameIdentifiers": [{"nameIdentifier": "112171", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takeichi, Sho"}], "nameIdentifiers": [{"nameIdentifier": "112172", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yamaguchi, Takashi"}], "nameIdentifiers": [{"nameIdentifier": "112173", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takashima, Keisuke"}], "nameIdentifiers": [{"nameIdentifier": "112174", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yamashita, Akihiro"}], "nameIdentifiers": [{"nameIdentifier": "112175", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yanai, Takeshi"}], "nameIdentifiers": [{"nameIdentifier": "112176", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Shinshi, Tadahiko"}], "nameIdentifiers": [{"nameIdentifier": "112177", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Fukunaga, Hirotoshi"}], "nameIdentifiers": [{"nameIdentifier": "112178", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2020-12-25"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JJAP59_SEEE01.pdf", "filesize": [{"value": "1.2 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 1200000.0, "url": {"label": "JJAP59_SEEE01.pdf", "url": "https://nagasaki-u.repo.nii.ac.jp/record/633/files/JJAP59_SEEE01.pdf"}, "version_id": "6d6c71a8-3191-4d42-ae34-29287bc4718c"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS"}]}, "item_type_id": "2", "owner": "2", "path": ["21"], "permalink_uri": "http://hdl.handle.net/10069/39803", "pubdate": {"attribute_name": "公開日", "attribute_value": "2020-12-19"}, "publish_date": "2020-12-19", "publish_status": "0", "recid": "633", "relation": {}, "relation_version_is_last": true, "title": ["Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS"], "weko_shared_id": -1}
Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS
http://hdl.handle.net/10069/39803
http://hdl.handle.net/10069/3980355db3a23-2e57-4e14-8495-2da184263cb7
名前 / ファイル | ライセンス | アクション |
---|---|---|
JJAP59_SEEE01.pdf (1.2 MB)
|
|
Item type | 学術雑誌論文 / Journal Article(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2020-12-19 | |||||
タイトル | ||||||
タイトル | Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Nakano, Masaki
× Nakano, Masaki× Takeichi, Sho× Yamaguchi, Takashi× Takashima, Keisuke× Yamashita, Akihiro× Yanai, Takeshi× Shinshi, Tadahiko× Fukunaga, Hirotoshi |
|||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We investigated the possibility of R (Nd or Pr)-Fe-B thick-film magnets applied to MEMS. First, an enhancement in the thickness of the Si oxide layer on a Si substrate enabled us to increase the adhesion force between the Si substrate and Nd-Fe-B film. Then, after depositing a glass buffer layer on the Si substrate to obtain a thicker Si oxide layer, we compared the mechanical characteristics and magnetic properties of both Pr-Fe-B and Nd-Fe-B films. As the thickness of the glass buffer layer increased, the thickness of the Pr-Fe-B film could be enhanced without mechanical destruction. We had difficulty in exceeding the thickness of 100 μm in Nd-Fe-B films. Moreover, the (BH)max value of a 127-μm-Thick Pr-Fe-B film was higher by approximately 30 kJ m-3 than that of a 92-μm-Thick Nd-Fe-B film. The obtained results suggest that a Pr-Fe-B thick-film magnet is more suitable for MEMS applications. | |||||
書誌情報 |
Japanese Journal of Applied Physics 巻 59, 号 SE, p. SEEE01, 発行日 2019-12-19 |
|||||
出版者 | ||||||
出版者 | The Japan Society of Applied Physics | |||||
出版者別言語 | ||||||
応用物理学会 | ||||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00214922 | |||||
EISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13474065 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.7567/1347-4065/ab5534 | |||||
権利 | ||||||
権利情報 | c 2019 The Japan Society of Applied Physics. | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Japanese Journal of Applied Physics, 59(SE), art.no.SEEE01; 2020 |