@article{oai:nagasaki-u.repo.nii.ac.jp:00014070, author = {Nakano, Masaki and Sato, S. and Yamashita, Fumitoshi and Honda, Takashi and Yamasaki, Jiro and Ishiyama, Kazushi I. and Itakura, Masaru and Fidler, J. and Yanai, Takeshi and Fukunaga, Hirotoshi}, issue = {6}, journal = {IEEE Transactions on Magnetics}, month = {Jun}, note = {Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced., IEEE Transactions on Magnetics, 43(6), pp.2672-2676; 2007}, pages = {2672--2676}, title = {Review of Fabrication and Characterization of Nd–Fe–B Thick Films for Magnetic Micromachines}, volume = {43}, year = {2007} }