@article{oai:nagasaki-u.repo.nii.ac.jp:00014370,
 author = {松本, 健 and 山口, 甚一郎 and 藤山, 寛},
 issue = {37},
 journal = {長崎大学工学部研究報告, Reports of the Faculty of Engineering, Nagasaki University},
 month = {Jul},
 note = {In order to prepare a protective thin film on inner wall of a metallic pipe with a small diameter, we developed a new coating method by using coaxial magnetron plasmas with multi hollow cathodes. In this method, in addition to the magnetron effect, hollow cathode discharge was realized to get high current density for lower pressure condition than that of a conventional coaxial magnetron plasma source. By using this plasma source, trial preparation of titanium nitride thin films on inner wall of a metallic pipe has been successfully performed at high deposition rate, ～100 [Å/sec] ., 長崎大学工学部研究報告, 21(37), pp.149-156; 1991},
 pages = {149--156},
 title = {マルチホロー陰極型同軸マグネトロンプラズマによる窒化チタン薄膜の形成},
 volume = {21},
 year = {1991}
}