{"created":"2023-05-15T16:40:12.110852+00:00","id":14370,"links":{},"metadata":{"_buckets":{"deposit":"76f420e8-a0dd-4a1a-9d86-e1af30760976"},"_deposit":{"created_by":2,"id":"14370","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"14370"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00014370","sets":["14:15:1180:1205"]},"author_link":["52353","52352","52350","52354","52355","52351"],"item_3_alternative_title_19":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Preparation of Titanium Nitride Thin Films by Using Coaxial Magnetron Plasmas with Multi Hollow Cathodes"}]},"item_3_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1991-07","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"37","bibliographicPageEnd":"156","bibliographicPageStart":"149","bibliographicVolumeNumber":"21","bibliographic_titles":[{"bibliographic_title":"長崎大学工学部研究報告"},{"bibliographic_title":"Reports of the Faculty of Engineering, Nagasaki University","bibliographic_titleLang":"en"}]}]},"item_3_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"In order to prepare a protective thin film on inner wall of a metallic pipe with a small diameter, we developed a new coating method by using coaxial magnetron plasmas with multi hollow cathodes. In this method, in addition to the magnetron effect, hollow cathode discharge was realized to get high current density for lower pressure condition than that of a conventional coaxial magnetron plasma source. By using this plasma source, trial preparation of titanium nitride thin films on inner wall of a metallic pipe has been successfully performed at high deposition rate, ～100 [Å/sec] .","subitem_description_type":"Abstract"}]},"item_3_description_64":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"長崎大学工学部研究報告, 21(37), pp.149-156; 1991","subitem_description_type":"Other"}]},"item_3_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"52353","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Matsumoto, Tsuyoshi"}]},{"nameIdentifiers":[{"nameIdentifier":"52354","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Yamaguchi, Jin-Ichiro"}]},{"nameIdentifiers":[{"nameIdentifier":"52355","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Fujiyama, Hiroshi"}]}]},"item_3_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"長崎大学工学部"}]},"item_3_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00178418","subitem_source_identifier_type":"NCID"}]},"item_3_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"02860902","subitem_source_identifier_type":"ISSN"}]},"item_3_source_id_8":{"attribute_name":"EISSN","attribute_value_mlt":[{"subitem_source_identifier":"18805574","subitem_source_identifier_type":"ISSN"}]},"item_3_text_63":{"attribute_name":"出版者別言語","attribute_value_mlt":[{"subitem_text_value":"Faculty of Engineering, Nagasaki University"}]},"item_3_version_type_16":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"松本, 健"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"山口, 甚一郎"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"藤山, 寛"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-22"}],"displaytype":"detail","filename":"kogaku21_37_08.pdf","filesize":[{"value":"1.6 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"kogaku21_37_08.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/14370/files/kogaku21_37_08.pdf"},"version_id":"ecc7ed4c-5d94-4288-b89d-058d313e448f"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"マルチホロー陰極型同軸マグネトロンプラズマによる窒化チタン薄膜の形成","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"マルチホロー陰極型同軸マグネトロンプラズマによる窒化チタン薄膜の形成"}]},"item_type_id":"3","owner":"2","path":["1205"],"pubdate":{"attribute_name":"公開日","attribute_value":"2010-10-25"},"publish_date":"2010-10-25","publish_status":"0","recid":"14370","relation_version_is_last":true,"title":["マルチホロー陰極型同軸マグネトロンプラズマによる窒化チタン薄膜の形成"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T00:20:16.398604+00:00"}