{"created":"2023-05-15T16:40:15.275373+00:00","id":14443,"links":{},"metadata":{"_buckets":{"deposit":"0e4ba710-252a-47a4-af5e-4b3c9b462b41"},"_deposit":{"created_by":2,"id":"14443","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"14443"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00014443","sets":["14:15:1180:1210"]},"author_link":["52837","52842","52840","52839","52844","52838","52843","52841"],"item_3_alternative_title_19":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Measurement of Indium Density in the Reactive Sputtering Using the Laser Induced Fluorescence"}]},"item_3_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1994-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"42","bibliographicPageEnd":"58","bibliographicPageStart":"51","bibliographicVolumeNumber":"24","bibliographic_titles":[{"bibliographic_title":"長崎大学工学部研究報告"},{"bibliographic_title":"Reports of the Faculty of Engineering, Nagasaki University","bibliographic_titleLang":"en"}]}]},"item_3_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"We have investigated the reactive sputtering of Indium-Tin-Oxide(ITO) in a dc glow discharge. Spatial distributions of absolute density of sputtered indium atoms were measured by the laser induced fluorescence spectroscopy. The maximum value of the indium density was 1011cm-3 for the case of pure argon dc discharge at the pressure of 0.2 Torr and the discharge voltage of 800 V.","subitem_description_type":"Abstract"}]},"item_3_description_64":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"長崎大学工学部研究報告, 24(42), pp.51-58; 1994","subitem_description_type":"Other"}]},"item_3_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"52841","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Kido, Takuya"}]},{"nameIdentifiers":[{"nameIdentifier":"52842","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Ano, Kazumi"}]},{"nameIdentifiers":[{"nameIdentifier":"52843","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Shirakata, Kazuhiro"}]},{"nameIdentifiers":[{"nameIdentifier":"52844","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Matsuda, Yoshinobu"}]}]},"item_3_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"長崎大学工学部"}]},"item_3_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00178418","subitem_source_identifier_type":"NCID"}]},"item_3_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"02860902","subitem_source_identifier_type":"ISSN"}]},"item_3_source_id_8":{"attribute_name":"EISSN","attribute_value_mlt":[{"subitem_source_identifier":"18805574","subitem_source_identifier_type":"ISSN"}]},"item_3_text_63":{"attribute_name":"出版者別言語","attribute_value_mlt":[{"subitem_text_value":"Faculty of Engineering, Nagasaki University"}]},"item_3_version_type_16":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"城戸, 拓也"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"阿野, 一巳"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"白方, 一浩"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"松田, 良信"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-22"}],"displaytype":"detail","filename":"kogaku24_42_09.pdf","filesize":[{"value":"620.1 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"kogaku24_42_09.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/14443/files/kogaku24_42_09.pdf"},"version_id":"90f7bca6-eaa5-4369-9cd4-2383c54be5e9"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"レーザー誘起蛍光法による反応性スパッタリング中の中性インジウム原子密度計測","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"レーザー誘起蛍光法による反応性スパッタリング中の中性インジウム原子密度計測"}]},"item_type_id":"3","owner":"2","path":["1210"],"pubdate":{"attribute_name":"公開日","attribute_value":"2010-11-02"},"publish_date":"2010-11-02","publish_status":"0","recid":"14443","relation_version_is_last":true,"title":["レーザー誘起蛍光法による反応性スパッタリング中の中性インジウム原子密度計測"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T00:18:49.251142+00:00"}