@article{oai:nagasaki-u.repo.nii.ac.jp:00014990,
 author = {Yang, S-C and Nakajima, Y and Maemura, Yoko and Matsuda, Yoshinobu and Fujiyama, Hiroshi},
 issue = {2},
 journal = {Plasma Sources Science and Technology},
 month = {May},
 note = {Particle transport phenomena were investigated in silane plasmas in the presence of a magnetic field B perpendicular to a discharge electric field E. From the experimental results, it was concluded that silicon particles were transported in the opposite direction to the E × B drift, and the particle density decreased with increasing applied magnetic flux density. Theoretical calculations on particle drift show that negatively charged particles can be transported in the opposite direction to E × B drift and the drift velocity increases with B for the present experimental conditions. Both experimental and theoretical results suggest that transport by modified ambipolar E × B drift can eliminate particles from discharge space., Plasma Sources Science and Technology, 5(2), pp.333-338; 1996},
 pages = {333--338},
 title = {Mechanism of particle transport in magnetized silane plasmas},
 volume = {5},
 year = {1996}
}