@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00016917,
 author = {Hayata, Shintaro and Nitta, Yuki and Nakatani, Tatsuyuki and Fujiyama, Hiroshi},
 month = {Jan},
 note = {text, ナノダイナミクス国際シンポジウム 平成22年1月21日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2010 (NSND2010), January 21, 2010, Nagasaki University, Nagasaki, Japan, Invited Lecture, Nagasaki Symposium on Nano-Dynamics 2010 (NSND2010), p.52-53; 2010},
 pages = {52--53},
 publisher = {Nano-Dynamics Group, Nagasaki University},
 title = {DLC Inner Wall Hybrid Coating of Narrow Tubes by the 2nd Harmonic ECR Micro Plasma},
 year = {2010}
}