@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00016923, author = {Shindo, Ryota and Iwata, Tadashi and Komine, Kazuki and Shinohara, Masanori and Matsuda, Yoshinobu}, month = {Jan}, note = {text, ナノダイナミクス国際シンポジウム 平成22年1月21日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2010 (NSND2010), January 21, 2010, Nagasaki University, Nagasaki, Japan, Invited Lecture, Nagasaki Symposium on Nano-Dynamics 2010 (NSND2010), p.64; 2010}, pages = {64--64}, publisher = {Nano-Dynamics Group, Nagasaki University}, title = {Measurement of Metal Atom Densities during Sputter-deposition of Al-doped ZnO Thin Films}, year = {2010} }