@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00016924, author = {Kitagawa, Hiroaki and Kan, Ryoji and Shinohara, Masanori and Matsuda, Yoshinobu}, month = {Jan}, note = {text, ナノダイナミクス国際シンポジウム 平成22年1月21日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2010 (NSND2010), January 21, 2010, Nagasaki University, Nagasaki, Japan, Invited Lecture, Nagasaki Symposium on Nano-Dynamics 2010 (NSND2010), p.65; 2010}, pages = {65--65}, publisher = {Nano-Dynamics Group, Nagasaki University}, title = {Thermal Probe Measurements of Energy Flux onto a Substrate in Inductively Coupled Plasmas}, year = {2010} }