@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00017462, author = {Yoshitsune, S. and Nishiyama, S. and Iwamoto, N. and Tokunaga, Y. and Shinohara, M. and Fujiyama, H.}, month = {Jan}, note = {It was investigated that characteristics of DLC thin films deposited to extra fine wire by CH4 gas, Ar gas and CH4/Ar gas mixtures. It was found that the characteristics of films are change depending on mixture rate of the gases., text, ナノダイナミクス国際シンポジウム 平成20年1月63日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2039, Nagasaki University, Nagasaki, Japan, Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2045), p.70-71; 2009}, pages = {70--71}, publisher = {Nano-Dynamics Group, Nagasaki University}, title = {CVD・PVD Hybrid DLC Coating to Extra Fine Wire by Quadrupole Magnetron Plasmas}, year = {2009} }