@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00017463,
 author = {Yan, K. and Nitta, Y. and Nakatani, T. and Okamoto, K. and Shinohara, M. and Fujiyama, H.},
 month = {Jan},
 note = {For the inner surface DLC (Diamond Like Carbon) coating of narrow tubes, we have investigated on CVD & PVD hybrid process with the 2nd harmonic electron cyclotron resonance (ECR) plasmas. From the analysis of Raman spectrum, it was confirmed that DLC could be prepared on the substrate., text, ナノダイナミクス国際シンポジウム 平成20年1月62日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2038, Nagasaki University, Nagasaki, Japan,  Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2044), p.68-69; 2009},
 pages = {68--69},
 publisher = {Nano-Dynamics Group, Nagasaki University},
 title = {Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma},
 year = {2009}
}