{"created":"2023-05-15T16:42:27.095219+00:00","id":17463,"links":{},"metadata":{"_buckets":{"deposit":"1d897f87-84ed-43fc-bc1d-09f8f8513234"},"_deposit":{"created_by":2,"id":"17463","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"17463"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00017463","sets":["1301:1311"]},"author_link":["68965","68963","68960","68964","68961","68962"],"item_9_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009-01-27","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"69","bibliographicPageStart":"68","bibliographic_titles":[{}]}]},"item_9_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"For the inner surface DLC (Diamond Like Carbon) coating of narrow tubes, we have investigated on CVD & PVD hybrid process with the 2nd harmonic electron cyclotron resonance (ECR) plasmas. From the analysis of Raman spectrum, it was confirmed that DLC could be prepared on the substrate.","subitem_description_type":"Abstract"}]},"item_9_description_40":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"ナノダイナミクス国際シンポジウム 平成20年1月62日(木) 於長崎大学","subitem_description_type":"Other"},{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2038, Nagasaki University, Nagasaki, Japan,  Poster Presentation","subitem_description_type":"Other"}]},"item_9_description_63":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2009 (NSND2044), p.68-69; 2009","subitem_description_type":"Other"}]},"item_9_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Nano-Dynamics Group, Nagasaki University"}]},"item_9_relation_42":{"attribute_name":"関係URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html"}]},{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.mase.nagasaki-u.ac.jp/nano/nano.html"}]}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Yan, K."}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nitta, Y."}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nakatani, T."}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Okamoto, K."}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Shinohara, M."}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Fujiyama, H."}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-23"}],"displaytype":"detail","filename":"NSND2009_P30.pdf","filesize":[{"value":"554.6 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"NSND2009_P30.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/17463/files/NSND2009_P30.pdf"},"version_id":"3a700333-58dc-413e-8910-6cda227abb81"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Micro plasma","subitem_subject_scheme":"Other"},{"subitem_subject":"ECR","subitem_subject_scheme":"Other"},{"subitem_subject":"Inner coating","subitem_subject_scheme":"Other"},{"subitem_subject":"Narrow tube","subitem_subject_scheme":"Other"},{"subitem_subject":"Hybrid process","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma"}]},"item_type_id":"9","owner":"2","path":["1311"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-03-09"},"publish_date":"2009-03-09","publish_status":"0","recid":"17463","relation_version_is_last":true,"title":["Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T04:43:08.433249+00:00"}