@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00017464,
 author = {Komine, Kazuki and Shinohara, Masanori and Matsuda, Yoshinobu},
 month = {Jan},
 note = {Arcing phenomena was investigated in DC magnetron sputtering of AZO target. Arc count was found to depend on discharge power and working pressure. The arc most frequently occurred at 5mTorr. Velocity of cathode spot was larger for higher pressure., text, ナノダイナミクス国際シンポジウム 平成20年1月61日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2037, Nagasaki University, Nagasaki, Japan,  Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2043), p.66-67; 2009},
 pages = {66--67},
 publisher = {Nano-Dynamics Group, Nagasaki University},
 title = {Observation of Arcing in DC Magnetron Sputtering of AZO Target},
 year = {2009}
}