{"created":"2023-05-15T16:42:27.138191+00:00","id":17464,"links":{},"metadata":{"_buckets":{"deposit":"b08a9a55-07b8-4cff-a13e-f46689db0b89"},"_deposit":{"created_by":2,"id":"17464","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"17464"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00017464","sets":["1301:1311"]},"author_link":["68968","68966","68967"],"item_9_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009-01-27","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"67","bibliographicPageStart":"66","bibliographic_titles":[{}]}]},"item_9_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Arcing phenomena was investigated in DC magnetron sputtering of AZO target. Arc count was found to depend on discharge power and working pressure. The arc most frequently occurred at 5mTorr. Velocity of cathode spot was larger for higher pressure.","subitem_description_type":"Abstract"}]},"item_9_description_40":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"ナノダイナミクス国際シンポジウム 平成20年1月61日(木) 於長崎大学","subitem_description_type":"Other"},{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2037, Nagasaki University, Nagasaki, Japan,  Poster Presentation","subitem_description_type":"Other"}]},"item_9_description_63":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2009 (NSND2043), p.66-67; 2009","subitem_description_type":"Other"}]},"item_9_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Nano-Dynamics Group, Nagasaki University"}]},"item_9_relation_42":{"attribute_name":"関係URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html"}]},{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.mase.nagasaki-u.ac.jp/nano/nano.html"}]}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Komine, Kazuki"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Shinohara, Masanori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Matsuda, Yoshinobu"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-23"}],"displaytype":"detail","filename":"NSND2009_P29.pdf","filesize":[{"value":"829.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"NSND2009_P29.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/17464/files/NSND2009_P29.pdf"},"version_id":"1c401334-7881-4ccd-b8c4-9e929a207293"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Observation of Arcing in DC Magnetron Sputtering of AZO Target","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Observation of Arcing in DC Magnetron Sputtering of AZO Target"}]},"item_type_id":"9","owner":"2","path":["1311"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-03-09"},"publish_date":"2009-03-09","publish_status":"0","recid":"17464","relation_version_is_last":true,"title":["Observation of Arcing in DC Magnetron Sputtering of AZO Target"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T04:43:03.760394+00:00"}