@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00017465,
 author = {Iwata, Tadashi and Kan, Ryouji and Shibasaki, Takashi and Shinohara, Masanori and Matsuda, Yoshinobu},
 month = {Jan},
 note = {This paper reports the outlines of hollow cathode (HCD) lamp absorption system for the density measurement of sputtered metal atoms in the inductively coupled plasma (ICP) assisted sputter-deposition process of Al doped ZnO thin films. As a result, absorbance of about 6.5% was obtained, which corresponds to the Zn atom density of 1.5×1012 cm-3., text, ナノダイナミクス国際シンポジウム 平成20年1月60日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2036, Nagasaki University, Nagasaki, Japan,  Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2042), p.64-65; 2009},
 pages = {64--65},
 publisher = {Nano-Dynamics Group, Nagasaki University},
 title = {Absorption Measurement of Zn Atom Density during ICP-assisted Magnetron Sputter-deposition of Al-doped ZnO Thin Films},
 year = {2009}
}