@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00017476,
 author = {Kan, Ryoji and Iwata, Tadashi and Shibasaki, Takashi and Shinohara, Masanori and Matsuda, Yoshinobu},
 month = {Jan},
 note = {We have investigated the influence of hydrogen addition on AZO thin films. The electric conductivity of the film was improved when a very small amount of hydrogen (0.25%) was added, but was decreased by adding excessive amount of hydrogen. The optical transmittance and the deposition rate were almost constant for a small amount of hydrogen addition of not more than 0.5%, but decreased by adding excessive amount of hydrogen., text, ナノダイナミクス国際シンポジウム 平成20年1月49日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2025, Nagasaki University, Nagasaki, Japan,  Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2031), p.44-45; 2009},
 pages = {44--45},
 publisher = {Nano-Dynamics Group, Nagasaki University},
 title = {Influence of hydrogen addition on electric and optical properties of sputter-deposited aluminum-doped zinc oxide thin films},
 year = {2009}
}