@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00017477,
 author = {Uehara, Kazuishi and Shinohara, Masanori and Matsuda, Yoshinobu},
 month = {Jan},
 note = {Optical reflectance interference has been investigated during the deposition processes of hydrocarbon thin films. A clear oscillation in the laser power reflected from the substrate has been observed during the deposition. From the instantaneous oscillation amplitude, temporal change in the refractive index was evaluated., text, ナノダイナミクス国際シンポジウム 平成20年1月48日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2024, Nagasaki University, Nagasaki, Japan,  Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2030), p.42-43; 2009},
 pages = {42--43},
 publisher = {Nano-Dynamics Group, Nagasaki University},
 title = {Monitoring of Chemical Vapor Deposition Process of Hydrocarbon Thin Films by Optical Reflectance Interferometry},
 year = {2009}
}