{"created":"2023-05-15T16:42:27.698941+00:00","id":17477,"links":{},"metadata":{"_buckets":{"deposit":"6bafa90a-e13b-46ec-963c-f11dbf8dbcb3"},"_deposit":{"created_by":2,"id":"17477","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"17477"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00017477","sets":["1301:1311"]},"author_link":["69009","69011","69010"],"item_9_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009-01-27","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"43","bibliographicPageStart":"42","bibliographic_titles":[{}]}]},"item_9_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Optical reflectance interference has been investigated during the deposition processes of hydrocarbon thin films. A clear oscillation in the laser power reflected from the substrate has been observed during the deposition. From the instantaneous oscillation amplitude, temporal change in the refractive index was evaluated.","subitem_description_type":"Abstract"}]},"item_9_description_40":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"ナノダイナミクス国際シンポジウム 平成20年1月48日(木) 於長崎大学","subitem_description_type":"Other"},{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2024, Nagasaki University, Nagasaki, Japan,  Poster Presentation","subitem_description_type":"Other"}]},"item_9_description_63":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2009 (NSND2030), p.42-43; 2009","subitem_description_type":"Other"}]},"item_9_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Nano-Dynamics Group, Nagasaki University"}]},"item_9_relation_42":{"attribute_name":"関係URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html"}]},{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.mase.nagasaki-u.ac.jp/nano/nano.html"}]}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Uehara, Kazuishi"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Shinohara, Masanori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Matsuda, Yoshinobu"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-23"}],"displaytype":"detail","filename":"NSND2009_P16.pdf","filesize":[{"value":"447.6 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"NSND2009_P16.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/17477/files/NSND2009_P16.pdf"},"version_id":"9d0eb6f6-168f-4800-88f5-975f71bbc25a"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Monitoring of Chemical Vapor Deposition Process of Hydrocarbon Thin Films by Optical Reflectance Interferometry","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Monitoring of Chemical Vapor Deposition Process of Hydrocarbon Thin Films by Optical Reflectance Interferometry"}]},"item_type_id":"9","owner":"2","path":["1311"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-03-09"},"publish_date":"2009-03-09","publish_status":"0","recid":"17477","relation_version_is_last":true,"title":["Monitoring of Chemical Vapor Deposition Process of Hydrocarbon Thin Films by Optical Reflectance Interferometry"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T04:41:35.468243+00:00"}