@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00017479, author = {Kawazoe, Hiroki and Inayoshi, Takanori and Shinohara, Masanori and Matsuda, Yoshinobu and Fujiyama, Hiroshi and Nitta, Yuki and Nakatani, Tatsuyuki}, month = {Jan}, note = {We investigated deposition process of amorphous carbon films using acetylene and methane as a source molecule, by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). We found that deposited film structures were different due to source molecules., text, ナノダイナミクス国際シンポジウム 平成20年1月46日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2022, Nagasaki University, Nagasaki, Japan, Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2028), p.38-39; 2009}, pages = {38--39}, publisher = {Nano-Dynamics Group, Nagasaki University}, title = {Source Molecular Effect on Amorphous Carbon Film Deposition}, year = {2009} }