{"created":"2023-05-15T16:42:27.789720+00:00","id":17479,"links":{},"metadata":{"_buckets":{"deposit":"9f0ee4df-d39c-4600-8d9e-109fade59269"},"_deposit":{"created_by":2,"id":"17479","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"17479"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00017479","sets":["1301:1311"]},"author_link":["69024","69021","69023","69019","69020","69025","69022"],"item_9_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009-01-27","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"39","bibliographicPageStart":"38","bibliographic_titles":[{}]}]},"item_9_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"We investigated deposition process of amorphous carbon films using acetylene and methane as a source molecule, by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). We found that deposited film structures were different due to source molecules.","subitem_description_type":"Abstract"}]},"item_9_description_40":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"ナノダイナミクス国際シンポジウム 平成20年1月46日(木) 於長崎大学","subitem_description_type":"Other"},{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2022, Nagasaki University, Nagasaki, Japan,  Poster Presentation","subitem_description_type":"Other"}]},"item_9_description_63":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2009 (NSND2028), p.38-39; 2009","subitem_description_type":"Other"}]},"item_9_publisher_33":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Nano-Dynamics Group, Nagasaki University"}]},"item_9_relation_42":{"attribute_name":"関係URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html"}]},{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.mase.nagasaki-u.ac.jp/nano/nano.html"}]}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Kawazoe, Hiroki"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Inayoshi, Takanori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Shinohara, Masanori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Matsuda, Yoshinobu"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Fujiyama, Hiroshi"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nitta, Yuki"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nakatani, Tatsuyuki"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-23"}],"displaytype":"detail","filename":"NSND2009_P14.pdf","filesize":[{"value":"447.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"NSND2009_P14.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/17479/files/NSND2009_P14.pdf"},"version_id":"a968c5d9-e9a3-417a-969b-4c6f520d5259"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Acetylene","subitem_subject_scheme":"Other"},{"subitem_subject":"Methane","subitem_subject_scheme":"Other"},{"subitem_subject":"Plasma","subitem_subject_scheme":"Other"},{"subitem_subject":"Amorphous carbon film","subitem_subject_scheme":"Other"},{"subitem_subject":"Deposition process","subitem_subject_scheme":"Other"},{"subitem_subject":"Infrared","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Source Molecular Effect on Amorphous Carbon Film Deposition","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Source Molecular Effect on Amorphous Carbon Film Deposition"}]},"item_type_id":"9","owner":"2","path":["1311"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-03-09"},"publish_date":"2009-03-09","publish_status":"0","recid":"17479","relation_version_is_last":true,"title":["Source Molecular Effect on Amorphous Carbon Film Deposition"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T04:41:19.957165+00:00"}