@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00017480,
 author = {Inayoshi, Takanori and Kawazoe, Hiroki and Shinohara, Masanori and Matsuda, Yoshinobu and Fujiyama, Hiroshi and Nitta, Yuki and Nakatani, Tatsuyuki},
 month = {Jan},
 note = {Substrate bias effects on the deposition process of amorphous carbon films were investigated by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). The density of the sp-CH species was increased in amorphous carbon films with substrate bias; on the other hand, the density of the sp3-CHX (X=1～3) species was decreased in amorphous carbon films with substrate bias., text, ナノダイナミクス国際シンポジウム 平成20年1月45日(木) 於長崎大学, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2021, Nagasaki University, Nagasaki, Japan,  Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2009 (NSND2027), p.36-37; 2009},
 pages = {36--37},
 publisher = {Nano-Dynamics Group, Nagasaki University},
 title = {Substrate Bias Effect on Deposition Process of Amorphous Carbon Films},
 year = {2009}
}