@article{oai:nagasaki-u.repo.nii.ac.jp:00021131, author = {内山, 休男 and 古澤, 誠 and 杉元, 雅則 and 小林, 和夫 and 羽坂, 雅之}, issue = {48}, journal = {長崎大学工学部研究報告}, month = {Jan}, note = {Diffusion of silicon atom and titanium atom in alumina ceramics was investigated. Diffusion coefficient of silicon atom or titanium atom in commercial alumina ceramics can be obtained, by measuring concentration of the heteroatoms with SIMS and using Gaussian type solution as the thin film solution. The amount of MgO as sintering additive and grain size did not affect diffusion coefficient of the heteroatoms in alumina ceramics., 長崎大学工学部研究報告 Vol.27(48) p. 161-166, 1997}, pages = {161--166}, title = {アルミナセラミックス中の不純物元素の拡散}, volume = {27}, year = {1997} }