@article{oai:nagasaki-u.repo.nii.ac.jp:00021162, author = {丸本, 洋 and 松田, 良信 and 篠原, 正典 and 藤山, 寛}, issue = {61}, journal = {長崎大学工学部研究報告}, month = {Jul}, note = {We investigated the influence of magnetic field near substrate surface (B_) on the crystal orientations of iron (Fe) thin by direct current (DC) magnetron sputtering deposition. We found that the effect depends on the iron deposition rates. While the crystal orientation of Fe thin films varied from Fe (110) to Fe (200) at the deposition rate of 9 and 12nm/min with the increase of B_, the crystal orientation did not change at the low deposition rate such as 4nm/min., 長崎大学工学部研究報告 Vol.33(61) p. 41-45, 2003}, pages = {41--45}, title = {基板表面磁界がスパッタ薄膜結晶配向性に及ぼす影響}, volume = {33}, year = {2003} }