{"created":"2023-05-15T16:45:12.891316+00:00","id":21162,"links":{},"metadata":{"_buckets":{"deposit":"4c01f518-be8c-48c1-8e3c-b7f472408b40"},"_deposit":{"created_by":2,"id":"21162","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"21162"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00021162","sets":["14:15:1180:1482"]},"author_link":["89759","89758","89767","89765","89764","89763","89756","89762","89760","89761","89766","89757"],"item_3_alternative_title_19":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Influence of Magnetic Field near Substrate Surface on Crystal Orientation of Sputtered Thin Films"}]},"item_3_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2003-07","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"61","bibliographicPageEnd":"45","bibliographicPageStart":"41","bibliographicVolumeNumber":"33","bibliographic_titles":[{"bibliographic_title":"長崎大学工学部研究報告"}]}]},"item_3_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"We investigated the influence of magnetic field near substrate surface (B_<sub>) on the crystal orientations of iron (Fe) thin by direct current (DC) magnetron sputtering deposition. We found that the effect depends on the iron deposition rates. While the crystal orientation of Fe thin films varied from Fe (110) to Fe (200) at the deposition rate of 9 and 12nm/min with the increase of B_<sub>, the crystal orientation did not change at the low deposition rate such as 4nm/min.","subitem_description_type":"Abstract"}]},"item_3_description_64":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"長崎大学工学部研究報告 Vol.33(61) p. 41-45, 2003","subitem_description_type":"Other"}]},"item_3_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"89764","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Marumoto, Hiroshi"}]},{"nameIdentifiers":[{"nameIdentifier":"89765","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Matsuda, Yoshinobu"}]},{"nameIdentifiers":[{"nameIdentifier":"89766","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Shinohara, Masanori"}]},{"nameIdentifiers":[{"nameIdentifier":"89767","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Fujiyama, Hiroshi"}]}]},"item_3_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00178418","subitem_source_identifier_type":"NCID"}]},"item_3_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"02860902","subitem_source_identifier_type":"ISSN"}]},"item_3_text_62":{"attribute_name":"sortkey","attribute_value_mlt":[{"subitem_text_value":"P00041-P00045"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"丸本, 洋"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"松田, 良信"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"篠原, 正典"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"藤山, 寛"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-23"}],"displaytype":"detail","filename":"KJ00004723977.pdf","filesize":[{"value":"1.2 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00004723977.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/21162/files/KJ00004723977.pdf"},"version_id":"d35102a6-7c90-485e-8f80-1e9860482dc6"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"基板表面磁界がスパッタ薄膜結晶配向性に及ぼす影響","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"基板表面磁界がスパッタ薄膜結晶配向性に及ぼす影響"}]},"item_type_id":"3","owner":"2","path":["1482"],"pubdate":{"attribute_name":"公開日","attribute_value":"2008-03-05"},"publish_date":"2008-03-05","publish_status":"0","recid":"21162","relation_version_is_last":true,"title":["基板表面磁界がスパッタ薄膜結晶配向性に及ぼす影響"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T02:06:53.883165+00:00"}