@article{oai:nagasaki-u.repo.nii.ac.jp:00021165,
 author = {松下, 正典 and 松田, 良信 and 藤山, 寛},
 issue = {61},
 journal = {長崎大学工学部研究報告},
 month = {Jul},
 note = {Generation of low-pressure micro-plasmas was investigated theoretically and experimentally by using the electron cyclotron resonance plasma generated in the narrow gap of a coaxial tube. By using xenon and by applying the magnetic flux densities satisfying from the harmonic ECR to ECR conditions, we have succeeded in generating micro-plasmas in the 500 μm gap of a coaxial tube at the pressure of 10^<-2> Torr., 長崎大学工学部研究報告 Vol.33(61) p. 57-61, 2003},
 pages = {57--61},
 title = {ハーモニック電子サイクロトロン共鳴マイクロプラズマ源の開発},
 volume = {33},
 year = {2003}
}