{"created":"2023-05-15T16:45:13.017542+00:00","id":21165,"links":{},"metadata":{"_buckets":{"deposit":"e0283f52-18bd-49bc-9333-28a2685ea760"},"_deposit":{"created_by":2,"id":"21165","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"21165"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00021165","sets":["14:15:1180:1482"]},"author_link":["89798","89801","89802","89804","89799","89806","89800","89805","89803"],"item_3_alternative_title_19":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Development of Harmonic Electron Cyclotron Resonance Micro-Plasma Sources"}]},"item_3_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2003-07","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"61","bibliographicPageEnd":"61","bibliographicPageStart":"57","bibliographicVolumeNumber":"33","bibliographic_titles":[{"bibliographic_title":"長崎大学工学部研究報告"}]}]},"item_3_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Generation of low-pressure micro-plasmas was investigated theoretically and experimentally by using the electron cyclotron resonance plasma generated in the narrow gap of a coaxial tube. By using xenon and by applying the magnetic flux densities satisfying from the harmonic ECR to ECR conditions, we have succeeded in generating micro-plasmas in the 500 μm gap of a coaxial tube at the pressure of 10^<-2> Torr.","subitem_description_type":"Abstract"}]},"item_3_description_64":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"長崎大学工学部研究報告 Vol.33(61) p. 57-61, 2003","subitem_description_type":"Other"}]},"item_3_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"89804","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Matsushita, Masanori"}]},{"nameIdentifiers":[{"nameIdentifier":"89805","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Matsuda, Yoshinobu"}]},{"nameIdentifiers":[{"nameIdentifier":"89806","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Fujiyama, Hiroshi"}]}]},"item_3_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00178418","subitem_source_identifier_type":"NCID"}]},"item_3_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"02860902","subitem_source_identifier_type":"ISSN"}]},"item_3_text_62":{"attribute_name":"sortkey","attribute_value_mlt":[{"subitem_text_value":"P00057-P00061"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"松下, 正典"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"松田, 良信"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"藤山, 寛"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-23"}],"displaytype":"detail","filename":"KJ00004723980.pdf","filesize":[{"value":"378.7 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00004723980.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/21165/files/KJ00004723980.pdf"},"version_id":"2b392f02-c309-40cc-9fda-70bc5483330d"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"ハーモニック電子サイクロトロン共鳴マイクロプラズマ源の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ハーモニック電子サイクロトロン共鳴マイクロプラズマ源の開発"}]},"item_type_id":"3","owner":"2","path":["1482"],"pubdate":{"attribute_name":"公開日","attribute_value":"2008-03-05"},"publish_date":"2008-03-05","publish_status":"0","recid":"21165","relation_version_is_last":true,"title":["ハーモニック電子サイクロトロン共鳴マイクロプラズマ源の開発"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T02:06:48.159664+00:00"}