@article{oai:nagasaki-u.repo.nii.ac.jp:00021210,
 author = {井手, 義行 and 篠原, 正典 and 松田, 良信 and 藤山, 寛},
 issue = {64},
 journal = {長崎大学工学部研究報告},
 month = {Mar},
 note = {Vacuum ultraviolet absorption spectroscopy system using a micro hollow cathode lamp has been built for the measurement of number densities of light element atoms such as atomic hydrogen, carbon, nitrogen and oxygen. Preliminary absorption measurement has been done in oxygen/argon inductively coupled plasma. A rough estimation showed the oxygen number densities of 10^<12>～10^<13>cm^<-3> for the ICP plasma produced at the following condition : RF power of 200W, total gas pressure of 50mTorr, , and O_2 partial pressure of 1.25mTorr., 長崎大学工学部研究報告 Vol.35(64) p. 35-39, 2005},
 pages = {35--39},
 title = {マイクロホローカソード光源を用いた真空紫外吸収分光法の開発},
 volume = {35},
 year = {2005}
}