@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00022478,
 author = {Yukishige, A and Nakatani, T. and Shinohara, M. and Fujiyama, H.},
 book = {Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008)},
 month = {Jan},
 note = {application/pdf, Microsize plasma sources have not been developed for the condition of low-pressure range less than 0.1Torr in the present technology. In this article we investigate a 2.45GHz microwave discharge operated at the ECR and the 2^<nd> harmonic ECR, by mirror magnetic field., text, Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) 平成20年1月29日(火)於長崎大学 Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008), pp.57-58},
 pages = {57--58},
 title = {LOW-PRESSURE MICRO PLASMA GENERATION USING MICROWAVE IN A MIRROR MAGNETIC FIELD},
 year = {2008}
}