{"created":"2023-05-15T16:46:15.318205+00:00","id":22478,"links":{},"metadata":{"_buckets":{"deposit":"bad91f34-0f5a-4558-a7bb-bf5e41a23c38"},"_deposit":{"created_by":2,"id":"22478","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"22478"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00022478","sets":["1301:1603"]},"author_link":["95618","95619","95616","95617"],"item_9_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2008-01-29","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"58","bibliographicPageStart":"57","bibliographic_titles":[{"bibliographic_title":"Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008)"}]}]},"item_9_description_15":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_9_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Microsize plasma sources have not been developed for the condition of low-pressure range less than 0.1Torr in the present technology. In this article we investigate a 2.45GHz microwave discharge operated at the ECR and the 2^<nd> harmonic ECR, by mirror magnetic field.","subitem_description_type":"Abstract"}]},"item_9_description_40":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) 平成20年1月29日(火)於長崎大学 Poster Presentation","subitem_description_type":"Other"}]},"item_9_description_63":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008), pp.57-58","subitem_description_type":"Other"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Yukishige, A"}],"nameIdentifiers":[{"nameIdentifier":"95616","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Nakatani, T."}],"nameIdentifiers":[{"nameIdentifier":"95617","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Shinohara, M."}],"nameIdentifiers":[{"nameIdentifier":"95618","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Fujiyama, H."}],"nameIdentifiers":[{"nameIdentifier":"95619","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-24"}],"displaytype":"detail","filename":"NSND2008_P24.pdf","filesize":[{"value":"276.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"NSND2008_P24.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/22478/files/NSND2008_P24.pdf"},"version_id":"23d64e0f-2170-43a3-82b6-2e06d9353a2a"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"microplasma","subitem_subject_scheme":"Other"},{"subitem_subject":"2^<nd> harmonic ECR","subitem_subject_scheme":"Other"},{"subitem_subject":"low pressure plasma generation","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"LOW-PRESSURE MICRO PLASMA GENERATION USING MICROWAVE IN A MIRROR MAGNETIC FIELD","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"LOW-PRESSURE MICRO PLASMA GENERATION USING MICROWAVE IN A MIRROR MAGNETIC FIELD"}]},"item_type_id":"9","owner":"2","path":["1603"],"pubdate":{"attribute_name":"公開日","attribute_value":"2008-02-12"},"publish_date":"2008-02-12","publish_status":"0","recid":"22478","relation_version_is_last":true,"title":["LOW-PRESSURE MICRO PLASMA GENERATION USING MICROWAVE IN A MIRROR MAGNETIC FIELD"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T01:12:04.950440+00:00"}