@inproceedings{oai:nagasaki-u.repo.nii.ac.jp:00022492,
 author = {Inayioshi, Takanori and Shinohara, Masanori and Kawazoe, Taiki and Matsuda, Yoshinobu and Fujiyama, Hiroshi and Nakatani, Tatsuyuki},
 book = {Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008)},
 month = {Jan},
 note = {application/pdf, The dependence of the deposition process of amorphous carbon films on growth temperatures has been investigated by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). The CH_3 peak of amorphous carbon film was decreased as the growth temperature was increased., text, Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) 平成20年1月29日(火)於長崎大学 Poster Presentation, Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008), pp.89-90},
 pages = {89--90},
 title = {Investigation of Deposition Process of Amorphous Carbon Film},
 year = {2008}
}