{"created":"2023-05-15T16:46:15.908759+00:00","id":22492,"links":{},"metadata":{"_buckets":{"deposit":"15b5af01-3003-4f30-9a0c-a883ba05f9f8"},"_deposit":{"created_by":2,"id":"22492","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"22492"},"status":"published"},"_oai":{"id":"oai:nagasaki-u.repo.nii.ac.jp:00022492","sets":["1301:1603"]},"author_link":["95674","95678","95677","95673","95675","95676"],"item_9_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2008-01-29","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"90","bibliographicPageStart":"89","bibliographic_titles":[{"bibliographic_title":"Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008)"}]}]},"item_9_description_15":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_9_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The dependence of the deposition process of amorphous carbon films on growth temperatures has been investigated by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). The CH_3 peak of amorphous carbon film was decreased as the growth temperature was increased.","subitem_description_type":"Abstract"}]},"item_9_description_40":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) 平成20年1月29日(火)於長崎大学 Poster Presentation","subitem_description_type":"Other"}]},"item_9_description_63":{"attribute_name":"引用","attribute_value_mlt":[{"subitem_description":"Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008), pp.89-90","subitem_description_type":"Other"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Inayioshi, Takanori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Shinohara, Masanori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Kawazoe, Taiki"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Matsuda, Yoshinobu"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Fujiyama, Hiroshi"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nakatani, Tatsuyuki"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-12-24"}],"displaytype":"detail","filename":"NSND2008_P40.pdf","filesize":[{"value":"261.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"NSND2008_P40.pdf","url":"https://nagasaki-u.repo.nii.ac.jp/record/22492/files/NSND2008_P40.pdf"},"version_id":"167f6f61-ab71-4e27-966c-88fe75530667"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"amorphous carbon film","subitem_subject_scheme":"Other"},{"subitem_subject":"deposition process","subitem_subject_scheme":"Other"},{"subitem_subject":"hydrogen","subitem_subject_scheme":"Other"},{"subitem_subject":"infrared spectroscopy","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Investigation of Deposition Process of Amorphous Carbon Film","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Investigation of Deposition Process of Amorphous Carbon Film"}]},"item_type_id":"9","owner":"2","path":["1603"],"pubdate":{"attribute_name":"公開日","attribute_value":"2008-02-12"},"publish_date":"2008-02-12","publish_status":"0","recid":"22492","relation_version_is_last":true,"title":["Investigation of Deposition Process of Amorphous Carbon Film"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-16T01:11:39.199266+00:00"}