@article{oai:nagasaki-u.repo.nii.ac.jp:00002370, author = {Yamashita, Akihiro and Hirotaki, Keishi and Kurosaki, A. and Yanai, Takeshi and Fukunaga, Hirotoshi and Fujiwara, Ryogen and Shinshi, Tadahiko and Nakano, Masaki}, issue = {4}, journal = {IEEE Transactions on Magnetics}, month = {Apr}, note = {Pr-Fe-B thick-film magnets were deposited on glass substrates without a buffer layer using a pulsed laser deposition method to apply the films to micro-electro-mechanical systems. Large particles with the average diameter of approximately 50~\mu \text{m} were emitted from a target and enabled us to obtain the relatively high deposition rate of 30~\mu \text{m} /h. An approximately 100~\mu \text{m} -thick Pr-Fe-B film with the (BH)-{\text {max}} value of 70 kJ/ \text{m}^{3} could be obtained. After polishing a Pr-Fe-B thick film deposited on a glass substrate with groove, the magnetic properties of the film did not deteriorate., IEEE Transactions on Magnetics, 53(4)}, title = {PLD-Fabricated Isotropic Pr?Fe?B Film Magnets Deposited on Glass Substrates}, volume = {53}, year = {2017} }